- Present the different stress sources in PVD thin films
- Identify the links between growth stages and intrinsic stress evolution during polycrystalline film growth
- Provide the basic concepts and underlying atomistic and microscopic mechanisms at the origin of stress generation and relaxation
- Practical insight into stress measurement by wafer curvature method and its limitations
- Understand the influence of microstructure (grain size, texture) and main process parameters on the stress development
- Discuss the role of energetic species, involved during magnetron sputtering, HiPIMS or ion-beam assisted deposition, on defect incorporation and compressive stress build-up
- Gain knowledge on stress manipulation strategies to control and engineer stress for specific applications
Gregory Abadias, Professor, Department of Physics and Mechanics of Materials, Institut Pprime, CNRS-University of Poitiers, FR
Gregory Abadias is a Professor at the Physics Department of the University of Poitiers, France. He received his Ph.D. in Materials Science in 1998 at National Polytechnic Institute of Grenoble (INPG), and he is currently Group Leader of thin films activities at CNRS Pprime Institute in Poitiers. He conducts research on a range of topics related to nanoscale thin films, including mechanical, electrical and optical properties of metallic, nitride or oxide systems, as well as hard and protective coatings in the form of nanocomposites or multilayers. His current research interests focus on the understanding of thin film growth dynamics using real-time and in situ diagnostics, and multi-scale modelling with main emphasis on the stress development during sputter-deposition of polycrystalline and epitaxial layers. He is co-author of more than 150 papers in peer-review journals and one book chapter. He is member-elected to the Scientific Council of the Physics Institute of CNRS since 2019, as well as French representative of the Surface Engineering Division of IUVSTA for 2019-2022 triennium. He has been involved in the organization of several symposia or workshops at international conferences (ICMCTF, EMRS) and serves as Editor of Surface and Coatings Technology journal since 2016.
Who Should Attend
This webinar is intended for researchers, students, technologists and others involved in the physical vapor deposition of thin films and looking to gain an understanding or broaden their knowledge on how intrinsic stress develops during thin film deposition, and how to mitigate it. This webinar will be beneficial to a large audience, from young scientists to engineers, as various aspects including basic concepts and modelling, instrumentation methods for measuring stress and strategies to control stress levels will be covered.
- $200 (AVS Platinum Member)
- $250 (Non-Member or AVS Gold/Silver Member)
- $50 (Full-time Student/Requires Student I.D.)
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You must be present the day of the webinar, recorded versions will not be available.
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