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• Know the basic concepts of plasma etching.
• Understand the physics of RF glow discharges (both high and low density).
• Understand the surface science aspects of reactive ion etching (RIE).
• Learn about plasma-surface chemistry leading to etching.
• Recognize the factors that influence etching anisotropy.

• Real vs virtual leaks
• Leak rate specifications
• Different leak detection methods
• How a mass spectrometer leak detector works
• Care and feeding of a mass spectrometer leak detector
• Basic ways to use a mass spectrometer leak detector
• What to do when a leak is found
• Possible steps when a system passes leak test but has sub-par performance
• Sources of gas that can affect vacuum system performance
• Ways to mitigate gas sources

• Learn about the types of commercially available vacuum pumps and their performance specifications.
• Learn how each pump works and what maintenance is required.
• Understand how to select a pump or pumps for a given application.

• Understand the three phases of vacuum chamber contamination: gases, films, and particulates.
• Learn the origins of vacuum chamber contaminants and methods for controlling or eliminating them.

• Understand the fundamentals of sputter deposition
• Review and discuss options for sputtering system design
• Learn how rf sputtering differs from dc sputtering and understand how rf sputtering works
• Understand reactive sputtering
• Understand thin film properties are modified by adjusting sputtering parameters

• Provide the basic knowledge required to interpret mass spectrometer (RGA) data, in vacuum applications ranging from UHV to atmospheric pressures.
• Presentation of elementary atomic electron structure
• Describe the filling of the electronic shells and sub shells
• Discuss molecule formation and the different types of molecular bonds
• Discuss operation of a mass spectrometer including its major components, i.e. ion source, mass separator, and detector and especially phenomena that occur in the ion source
• Discuss interpretation of the mass spectrometer spectra by presenting typical spectra for many common molecules and analysis of gas samples containing many different molecules
• Various types of analysis techniques are presented and many existing data bases are suggested
• Discuss chemical interactions between mass spectrometers and the sampled gases