AVS National Online Short Course Program Now Available!

AVS has been offering online training for technicians, scientists and engineers during COVID-19 with great success and reduced fees! If you are not able to travel due to restrictions, consider online training with us. While we hope to return to in person training AVS is bringing seven (7) AVS Short Courses and our qualified instructors to you via Zoom for our AVS National Online Short Course Program!
Cost Per Course (1-Day/2-Day):

Platform: Zoom

Times listed are Eastern Daylight Time (EDT). Check your timezone!

Each course will include a link to a pdf file of the copyrighted course notes. During the online course you may ask questions. Instructors will review and answer them periodically throughout the course. 

You must be present the day of the course, recorded versions are not available.

Save with AVS Membership

Save $50 per AVS Webinar with an AVS Platinum Membership. The savings from just two webinars is equivalent to the price of an AVS Platinum Membership, which provides discounts on conferences/short courses as well as access to the AVS publications and technical libraries, career services, and more. Don’t miss out on these savings. Contact Angela Klink, AVS Member Services Administrator, angela@avs.org for your discount code or to upgrade to Platinum.

NEW! Online Training Sponsorship Opportunities Available

AVS Online Training has new sponsorship opportunities available. If you would like to sponsor an upcoming AVS short course program (public programs only), webinar, and/or e-Talk click here!

Atomic Layer Etching

Date: Wednesday, September 28, 2022
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Learn the fundamentals of ALE based on sequential self-limiting reactions.
  • Understand the differences between plasma ALE and thermal ALE.
  • Learn about the surface chemistry and reactors for ALE.
  • Understand why plasma ALE can obtain atomic layer precise anisotropic etching.
  • Learn how thermal ALE can achieve atomic layer precise isotropic etching.
  • Learn how ALE can be utilized for thin film nanoengineering and device fabrication.
  • Understand the many current and potential applications of ALE.

Steve George

Professor, Dept. of Chemistry and Biochemistry
University of Colorado at Boulder

Plasma Etching and RIE: Fundamentals & Applications
(1 or 2 day option: Day 1-Fundamentals; Day 2-Applications)

Date: Thursday, September 29, 2022 (Day 1: Fundamentals)
           Friday, September 30, 2022 (Day 2: Applications)
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Know the basic concepts of plasma etching.
  • Understand the physics of RF glow discharges (both high and low density).
  • Understand the surface science aspects of reactive ion etching (RIE).
  • Learn about plasma-surface chemistry leading to etching.
  • Recognize the factors that influence etching anisotropy.

Randy Shul
Technical Staff (Retired)
Sandia National Laboratories

Sputter Deposition (1 day)

Date: Monday, October 3, 2022
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Understand the fundamentals of sputter deposition
  • Review and discuss options for sputtering system design
  • Learn how rf sputtering differs from dc sputtering and understand how rf sputtering works
  • Understand reactive sputtering
  • Understand thin film properties are modified by adjusting sputtering parameters

Angus Rockett
Head for Dept. of Metallurgical and Materials Engineering
Colorado School of Mines

Vacuum System Leak Detection and Basic Troubleshooting

Date: Tuesday, October 4, 2022
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Real vs virtual leaks
  • Leak rate specifications
  • Different leak detection methods
  • How a mass spectrometer leak detector works
  • Care and feeding of a mass spectrometer leak detector
  • Basic ways to use a mass spectrometer leak detector
  • What to do when a leak is found
  • Possible steps when a system passes leak test but has sub-par performance
  • Sources of gas that can affect vacuum system performance
  • Ways to mitigate gas sources

Neil Peacock
Pine Place Consulting, LLC

Controlling Contamination in Vacuum Systems

Date: Wednesday, October 5, 2022
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Understand the three phases of vacuum chamber contamination: gases, films, and particulates.
  • Learn the origins of vacuum chamber contaminants and methods for controlling or eliminating them.

Tim Gessert
Managing Member
Gessert Consulting, LLC

Basics of Radio Frequency Technology (1-day)

Date: Thursday, October 13, 2022
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Understand the radio frequency (RF) plasma system as an electronic circuit.
  • Learn a systematic approach to viewing a RF plasma system.
  • Know techniques for maintaining and troubleshooting RF systems.

John Caughman
Senior Staff
Oak Ridge National Laboratory

Partial Pressure Analysis with Residual Gas Analyzers

Date: Friday, October 14, 2022
Time: 10:00 a.m.-5:00 p.m. EDT
Course Objectives
  • Basic operation principles of mass spectrometers for residual gas analysis.
  • How to specify the best RGA system configuration for your application.
  • How to configure RGA software and process control I/O to perform gas analysis and track real-time changes in gas composition. 
  • Routine maintenance, tuning and calibration procedures.
  • Quantitative compositional analysis and process control (actionable information) options.
  • Spectral Interpretation: Quickly and effectively interpret typical RGA spectra. Monitor the quality of your vacuum process. Fingerprint your gas chamber. Chamber matching opportunities.
  • How to differentiate between background and process gases 
  • Typical chemical interactions between RGAs and sampled gases.

Gerardo Brucker

Chief Scientist and CTO
Granville-Phillips Division of MKS Instruments

Other AVS Events

AVS Mid-Atlantic Chapter Short Course Program (Virtual)
November 21, 2022
Platform: Zoom 

  • Atomic Layer Deposition


AVS Courses by Request

If you are interested in seeing an AVS Short Course offered in 2022 please complete the AVS Courses by Request form.

AVS Onsite/Online Training
Do your employees need training now? Are budgets tight? Let AVS bring our short courses and qualified instructors to your organization during these tough economic times via Zoom. Please complete the AVS Onsite/Online Training request form to receive a proposal.


AVS e-Talk: Heterogeneous Integration for mmWave Wireless Communication Systems
September 28, 2022
1:00-2:00 p.m. EDT
Instructor: Madhavan Swaminathan

AVS e-Talk: Design, Realization, Applications of Gas and Ion Separations Materials
November 16, 2022
1:00-2:00 p.m. EST
Instructor: Tina Nenoff

Have an Idea for an AVS e-Talk?

Matthew Jordan
AVS e-Talk Chair

Have an Idear for an AVS Webinar?

David Adams
AVS Short Course Comittee Chair