As semiconductor devices continue to scale for artificial intelligence and high-performance computing applications, molybdenum is gaining attention as a next-generation material for advanced thin film processes. Its strong conductivity and low resistivity make it a compelling candidate for highly integrated structures where performance, power efficiency, and process reliability are increasingly critical.

This e-Talk will provide an educational overview of molybdenum in semiconductor thin film deposition, including key material properties, process considerations, and the practical challenges associated with stable handling and delivery. The discussion will also address why advanced delivery approaches are important when working with solid source precursors that require careful moisture control and stable process operation.

Participants will gain a technical understanding of how molybdenum can support next-generation semiconductor process requirements, and what factors should be considered when evaluating materials and delivery strategies for advanced deposition environments.

Dr. Benjamin Garrett is the Head of New Product Introduction within the Innovation team for Specialty Gases and Delivery Systems and Services at EMD Electronics, the Electronics business of Merck KGaA, Darmstadt, Germany. Benjamin leads the New Product Introduction process for both businesses to maximize the return on R&D investments and drive new products to a successful launch. Ben has over a decade of experience working on molybdenum precursors and supporting New Product Development teams for thin film deposition product lines. He holds a PhD and BS in Chemistry from The Ohio State University and University of Illinois Urbana-Champaign, respectively.