AVS National Online Short Course Program Now Available!
General Information -
- AVS Platinum Member
$650 (2-day course); $350 (1-day course)
- Non-Member
$700 (2-day course); $400 (1-day course)
- Full-time Student/Requires Student I.D.
$300 (2-day course); $200 (1-day course)
Platform: Zoom
Course Includes: Link to PDF file of the copyrighted course notes.
IMPORTANT: You must be present the day of the course, recorded versions will not be available.
Course Times: Courses will either be half day (4 hours/day) with hourly 10 minutes breaks, or full day (7 hours/day) with morning and afternoon breaks, plus a 30-minute lunch break.
- Half Day: 10:00 a.m.-2:00 p.m. (ET)
- Full Day: 10:00 a.m.-5:00 p.m. (ET)
Times listed are Eastern Time (ET). Check your timezone!
During the online course you may ask questions. Instructors will review and answer them periodically throughout the course.
NEW! AVS Online Training Sponsorship Opportunities Available
Would your company like to sponsor an upcoming AVS Short Course Program (public programs only), Webinar, and/or e-Talk? AVS Online Training has new sponsorship opportunities available.
Your Logo Here Your Logo Here Plasma-enhanced CVD: Fundamentals, Techniques, and Applications
- Learn why, where and how PECVD is used in industrial applications ranging from solar photovoltaics and semiconductors to hard coatings.
- Understand how the process variables affect the properties of materials and device performance.
- Learn and understand the basics of plasma equipment design and operation.
- Get a broad overview of current manufacturing equipment and fabrication processes.
Basics of Radio Frequency Technology
- Understand the radio frequency (RF) plasma system as an electronic circuit.
- Learn a systematic approach to viewing a RF plasma system.
- Know techniques for maintaining and troubleshooting RF systems.
Plasma and Ion Beam Diagnostics: Principles & Applications
- Learn about the basics of gas discharges.
- Learn about the fundamentals of industrial plasmas.
- Learn how to use diagnostics to measure density, temperature, and energy of neutrals and charged particles in a plasma.
- Learn how to apply diagnostics to ion beams in order to measure current, current density, energy, energy spread, beam profile, and beam divergence.
- Learn how to measure electric and magnetic fields, and how to use various mass analyzers.
- Know about the applications of several state-of-the-art plasma and ion beam diagnostics in research and industry.
Cleaning & Surface Conditioning Techniques for IC Manufacturing
- Obtain a basic knowledge of various surface conditioning and cleaning technologies used in the manufacture of ICs.
- Learn about the processes and equipment used for wet, plasma, and dry cleaning.
- Receive an overview and comparison of established surface conditioning and cleaning techniques and new technologies. In addition, this course will introduce new technologies such as supercritical fluid processing that may be used for future clean requirement.
- Find out information on specific surface conditioning techniques including critical cleaning, photoresist stripping, and post-CMP cleaning. Discuss techniques such as megasonics, dilute chemistries, and the use of ozone.
- Understand of how the cleans affects low-k dielectrics and copper. Includes cleaning challenges for new materials.
Atomic Layer Etching
- Learn the fundamentals of ALE based on sequential self-limiting reactions.
- Understand the differences between plasma ALE and thermal ALE.
- Learn about the surface chemistry and reactors for ALE.
- Understand why plasma ALE can obtain atomic layer precise anisotropic etching.
- Learn how thermal ALE can achieve atomic layer precise isotropic etching.
- Learn how ALE can be utilized for thin film nanoengineering and device fabrication.
- Understand the many current and potential applications of ALE.
Instructor
Steve George
Professor, Department of Chemistry & Biochemistry
University of Colorado at Boulder
Other AVS Events
AVS Rocky Mountain Chapter Short Course Program
Westminster, CO
September 18-20, 2024
- Five (5) Courses being offered
AVS National Short Course Program - In Person Only
Tampa Convention Center, Tampa, Florida
November 4-7, 2024
- Fundamentals of Vacuum Technology (Nov. 4-7)
- Plasma Etching and RIE: Fundamentals and Applications (Nov. 4-5)
AVS Courses by Request
If you are interested in seeing an AVS Short Course offered in 2025 please complete the AVS Courses by Request form. (Recommended for individual training)
AVS Onsite/Online Training
Do your employees need training now? Are budgets tight? Let AVS bring our short courses and qualified instructors to your organization during these tough economic times via Zoom. Please complete the AVS Onsite/Online Training request form to receive a proposal. (Recommended for group training)
AVS Publications Professional Development Webinar
Becoming a Peer Reviewer: Everything You Need to Know
Presenters: Eray Aydil, Stephanie Law, Mohan Sankaran, Alex Shard
Date: October 15, 2024
Time: 1:00 p.m.-2:00 p.m. ET
Have an Idea for a Webinar or e-Talk?
We welcome suggestions for future Webinars and/or e-Talk topics and speakers.
Please e-mail Webinar suggestions to David Adams, AVS Short Course Chair, david_adams@avs.org.
Please e-mail e-Talk suggestions to Matthew Jordan, AVS e-Talk Chair, matt_jordan@avs.org.