AVS National Online Short Course Program Now Available!
- $350/$650 (AVS Platinum Member)
- $400/$700 (AVS Gold or Silver Member-Click Here to Upgrade to Platinum Now and Save All Year)
- $400/$700 (Non-Member)
- $200/$300 (Full-time Student/Requires Student I.D.)
Platform: Zoom
Times listed are Eastern Time (ET). Check your timezone!
Each course will include a link to a pdf file of the copyrighted course notes. During the online course you may ask questions. Instructors will review and answer them periodically throughout the course.
You must be present the day of the course, recorded versions are not available.
Save with AVS Membership
Save $50 per AVS Short Course with an AVS Platinum Membership. The savings from just two courses is equivalent to the price of an AVS Platinum Membership, which provides discounts on conferences, short courses and webinars as well as access to the AVS publications and technical libraries, career services, and more. Don’t miss out on these savings. Contact Angela Klink, AVS Member Services Administrator, angela@avs.org for your discount code or to upgrade to Platinum.
NEW! AVS Online Training Sponsorship Opportunities Available
Would your company like to sponsor an upcoming AVS Short Course Program (public programs only), Webinar, and/or e-Talk? AVS Online Training has new sponsorship opportunities available.
Your Logo Here Your Logo Here Cleaning and Surface Conditioning Techniques
for Integrated Circuit Manufacturing
- Obtain a basic knowledge of various surface conditioning and cleaning technologies used in the manufacture of ICs.
- Learn about the processes and equipment used for wet, plasma, and dry cleaning.
- Receive an overview and comparison of established surface conditioning and cleaning techniques and new technologies. In addition, this course will introduce new technologies such as supercritical fluid processing that may be used for future clean requirement.
- Receive an overview and comparison of established surface conditioning and cleaning techniques and new technologies. In addition, this course will introduce new technologies such as supercritical fluid processing that may be used for future clean requirement.
- Understand of how the cleans affects low-k dielectrics and copper. Includes cleaning challenges for new materials.
Atomic Layer Etching
- Learn the fundamentals of ALE based on sequential self-limiting reactions.
- Understand the differences between plasma ALE and thermal ALE.
- Learn about the surface chemistry and reactors for ALE.
- Understand why plasma ALE can obtain atomic layer precise anisotropic etching.
- Learn how thermal ALE can achieve atomic layer precise isotropic etching.
- Learn how ALE can be utilized for thin film nanoengineering and device fabrication.
- Understand the many current and potential applications of ALE.
Instructor
Steve George
Professor, Dept. of Chemistry and Biochemistry
University of Colorado at Boulder
Sputter Deposition (1 day)
- Understand the fundamentals of sputter deposition
- Review and discuss options for sputtering system design
- Learn how rf sputtering differs from dc sputtering and understand how rf sputtering works
- Understand reactive sputtering
- Understand thin film properties are modified by adjusting sputtering parameters
Instructor
Angus Rockett
Head for Dept. of Metallurgical and Materials Engineering
Colorado School of Mines
UHV Design and Practices
- Understand the pump factors that limit ultimate pressure.
- Know the degassing methods that minimize the total outgassing rate.
- Learn how to measure total and partial pressures in UHV.
- Learn the operating methods necessary to maintain UHV.
Vacuum Pumps: An Introduction to their Operation and Maintenance
- Learn about the types of commercially available vacuum pumps and their performance specifications.
- Learn how each pump works and what maintenance is required.
- Understand how to select a pump or pumps for a given application.
Plasma Etching and RIE: Fundamentals & Applications
(1 or 2 day option: Day 1-Fundamentals; Day 2-Applications)
Wednesday, March 22, 2023 (Day 2: Applications)
- Know the basic concepts of plasma etching.
- Understand the physics of RF glow discharges (both high and low density).
- Understand the surface science aspects of reactive ion etching (RIE).
- Learn about plasma-surface chemistry leading to etching.
- Recognize the factors that influence etching anisotropy.
Essentials of Accurate and Reliable Surface Analysis using
X-ray Photoelectron Spectroscopy (XPS) and
Auger Electron Spectroscopy (AES)
X-ray Photoelectron Spectroscopy (XPS) and
Auger Electron Spectroscopy (AES)
- Learn essential principles of two major surface analytical methods – XPS and AES,
- Learn capabilities and limitations of techniques.
- Become familiar with the many applications of XPS and AES for material analysis, product testing, and quality control.
- Learn accurate and reliable practices of quantitative surface analysis.
Partial Pressure Analysis with Residual Gas Analyzers
- Basic operation principles of mass spectrometers for residual gas analysis.
- How to specify the best RGA system configuration for your application.
- How to configure RGA software and process control I/O to perform gas analysis and track real-time changes in gas composition.
- Routine maintenance, tuning and calibration procedures.
- Quantitative compositional analysis and process control (actionable information) options.
- Spectral Interpretation: Quickly and effectively interpret typical RGA spectra. Monitor the quality of your vacuum process. Fingerprint your gas chamber. Chamber matching opportunities.
- How to differentiate between background and process gases
- Typical chemical interactions between RGAs and sampled gases.
Other AVS Events
AVS New Mexico Chapter Short Course Program (IN PERSON)
Albuquerque, NM
May 22-25, 2023
- Basic Vacuum Technology (4 days) (5/22-25/23)
- Basics of Radio Frequency Technology (5/22/23)
- Improving the Efficiency of Vacuum Processes (5/22/23)
- Vacuum and Cryogen Safety (5/24/23)
- Plasma and Ion Beam Diagnostics: Principles and Applications (5/25/23)
ICMCTF 2023 Short Course Program
Town & Country Resort Hotel and Convention Center
San Diego, CA
May 21-25, 2023
- Plasma Basics (5/21/23)
- Physics of Plasmas use in Deposition Processes (5/22/23)
- Fundamentals of Sputter Deposition (5/22/23)
- Control of Micro- and Nanostructure Evolution during Physcal Vapor Deposition (5/23/23)
- Fundamentals of HiPIMS Plasmas for Thin Film Deposition (5/23/23)
- Advanced Understanding of HiPIMS Plasmas for Thin Film Deposition (5/24/23)
- Practical Thin Film Characterization - An Introduction (5/24/23)
- Thin Film Characterization by X-ray Photoelectron Spectroscopy (5/25/23)
AVS Courses by Request
If you are interested in seeing an AVS Short Course offered in 2023 please complete the AVS Courses by Request form. (Recommended for individual training)
AVS Onsite/Online Training
Do your employees need training now? Are budgets tight? Let AVS bring our short courses and qualified instructors to your organization during these tough economic times via Zoom. Please complete the AVS Onsite/Online Training request form to receive a proposal. (Recommended for group training)
AVS e-Talk: Surface Microscopy and Microanalysis in an Industrial Research Laboratory
April 19, 2023
1:00-2:00 p.m. ET
Instructor: Vincent S. Smentkowski
REGISTER HERE!
Mass-production of 2D Electronic Medical Diagnostics for Home Use
June 7, 2023
1:00 PM - 2:00 PM
Instructor(s): Christopher Muratore
Registration Coming Soon!
Have an Idea for an AVS e-Talk?
Contact:
Matthew Jordan
AVS e-Talk Chair
matt_jordan@avs.org
Have an Idear for an AVS Webinar?
Contact:
David Adams
AVS Short Course Comittee Chair
david_adams@avs.org