Wednesday, February 10, 2021
Webinar-Plasma-Assisted Atomic Layer Deposition: From Basics to Applications1:00 PM - 5:00 PM
Time Zone: (UTC-04:00) Eastern Time (US & Canada) [Change Time Zone]
Atomic Layer Deposition (ALD) has become a key technology in both the lab and the fab with many devices and other applications benefiting from the (ultra)thin films that can be prepared with very precise thickness control and with unparalleled conformality and uniformity. Nowadays, a significant number of the ALD processes employed are so-called plasma-assisted or plasma-enhanced ALD processes. In the last decade, this method has faced a real breakthrough in high-volume manufacturing and an extensive set of processes and reactor designs have been demonstrated. Yet the reasons why and when to use plasma-assisted ALD are often not clear as well what kind of plasma configurations to use and which conditions to apply. Also, misconceptions about the implications of using plasmas during ALD exist, for example with respect to plasma damage and limitations of conformality. This webinar will address these aspects starting with the basics of ALD and plasma-based processing and will range up to the applications that can benefit from plasma-assisted ALD.

Webinar Objectives/Topics

  • Provide the basic concepts of plasma-based processing and thin film preparation by (plasma-assisted) ALD
  • Gain knowledge on the role of reactive and energetic species such as radicals, ions, and photons on the process and resulting film properties, including film conformality on 3D surface topologies
  • Present an overview of plasma ALD reactors and discuss important design and processes parameters
  • Discuss several plasma-assisted ALD processes for key material systems
  • Give insight into existing and potential future applications of plasma-assisted ALD
  • Understand the pros and cons of plasma-assisted ALD with respect to thermal ALD


Erwin Kessels, Professor
Dept. of Applied Physics
Eindhoven University of Technology

Who Should Attend

This webinar is intended for researchers, students, technologists and others involved or interested in atomic layer deposition (ALD) of thin films and who are looking to gain an understanding or broaden their knowledge on how the use of plasma-assisted ALD can be beneficial for certain materials and applications. The webinar will be valuable for a large audience, from young scientists to engineers, even if their starting knowledge on plasma-based processing or ALD is limited.

Webinar Cost


Platform: Zoom

Times listed are Eastern Standard Time (EST)Check your timezone accordingly!

Each webinar includes a link to a pdf file of the copyrighted webinar notes. During the webinar you may ask questions. Presenters will review and answer them periodically throughout the presentation. 

You must be present the day of the webinar, recorded versions will not be available.

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Save $50 per AVS Webinar with an AVS Platinum Membership. The savings from just two webinars is equivalent to the price of an AVS Platinum Membership, which provides discounts on conferences/short courses as well as access to the AVS publications and technical libraries, career services, and more. Don’t miss out on these savings. Contact Angela Klink, AVS Member Services Administrator, angela@avs.org for your discount code or to upgrade to Platinum.

Other AVS Events

AVS 2021 Short Course, Webinar and e-Talk Schedule

AVS 2021 Short Course programs (Chapter, National, Webinars, and e-Talks) will be posted on the AVS Short Schedule page as they become available. Please bookmark the webpage to view upcoming training opportunities.


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1:00 p.m. - 5:00 p.m. EST
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AVS Webinar: Characterization of Thin Film Systems for Flexible Applications
March 2, 2021
1:00 p.m. - 5:00 p.m. EST
Instructor: Megan Cordill and Christian Mitterer

AVS Webinar: Gallium Oxide Materials and Devices for Next Generation Ultra-Wide Bandgap Electronics
April 8, 2021
1:00 p.m.-5:00 p.m. EDT
Instructor: Sriram Krishnamoorthy

AVS Short Course: Plasma Etching and RIE: Fundamentals and Applications
February 23, 2021
10:00 a.m. - 5:00 p.m. EST
Instructor: Randy Shul

AVS Short Course: Vacuum Pumps An Introduction to their Operation and Maintenance
February 24, 2021
10:00 a.m. - 5:00 p.m. EST
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AVS Short Course: Sputter Deposition
February 26, 2021
10:00 a.m. - 5:00 p.m. EST
Instructor: Angus Rockett

AVS Courses by Request
If you are interested in seeing an AVS Short Course offered in 2021 please complete the AVS Courses by Request form.

AVS Onsite/Online Training

Do your employees need training now? Are budgets tight? Let AVS bring our short courses and qualified instructors to your organization during these tough economic times via Zoom. Please complete the AVS Onsite/Online Training request form to receive a proposal.