AVS National Online Short Course Program Now Available!
General Information -
- AVS Platinum Member
$350 (1-day course)
- Non-Member
$400 (1-day course)
- Full-time Student/Requires Student I.D.
$200 (1-day course)
Platform: Zoom
Course Includes: Link to PDF file of the copyrighted course notes.
IMPORTANT: You must be present the day of the course, recorded versions will not be available.
Course Times: Courses will either be half day (4 hours/day) with hourly 10 minutes breaks, or full day (7 hours/day) with morning and afternoon breaks, plus a 30-minute lunch break. Refer to course listings below
- Half Day: 10:00 a.m.-2:00 p.m. (ET)
- Full Day: 10:00 a.m.-5:00 p.m. (ET)
Times listed are Eastern Time (ET). Check your timezone!
During the online course you may ask questions. Instructors will review and answer them periodically throughout the course.
NEW! AVS Online Training Sponsorship Opportunities Available
Looking for additional sponsorship opportunities? Want to reach a broader audience? Consider sponsoring an upcoming AVS Short Course Program (public programs only), Webinar, and/or e-Talk? AVS Online Training has sponsorship opportunities available.
Your Logo Here Your Logo Here Controlling Contamination in Vacuum Systems
- Understand the three phases of vacuum chamber contamination: gases, films, and particulates.
- Learn the origins of vacuum chamber contaminants and methods for controlling or eliminating them.
Introduction to Spectroscopic Ellipsometry
- Understand the analytical measurement technique called Spectroscopic Ellipsometry
- Learn about measuring the thickness and optical functions of very thin films.
- Understand concept of polarized light and method of describing optical functions.
- Determine the thickness and optical functions of a very thin film using spectroscopic ellipsometry.
UHV Design and Practices
- Understand the pump factors that limit ultimate pressure.
- Know the degassing methods that minimize the total outgassing rate.
- Learn how to measure total and partial pressures in UHV.
- Learn the operating methods necessary to maintain UHV.
Partial Pressure Analysis with Residual Gas Analyzers
- Basic operation principles of mass spectrometers for residual gas analysis.
- How to specify the best RGA system configuration for your application.
- How to configure RGA software and process control I/O to perform gas analysis and track real-time changes in gas composition.
- Routine maintenance, tuning and calibration procedures.
- Quantitative compositional analysis and process control (actionable information) options.
- Spectral Interpretation: Quickly and effectively interpret typical RGA spectra. Monitor the quality of your vacuum process. Fingerprint your gas chamber. Chamber matching opportunities.
- How to differentiate between background and process gases
- Typical chemical interactions between RGAs and sampled gases.
Instructor
Gerardo Brucker
Chief Scientist and Business Unit Chief Technology Officer for Mass Spectrometry and Indirect Pressure Measurement
MKS Instruments, Inc.
Semiconductor Device Manufacturing Overview
- Gain a "big picture" understanding of the steps involved in making and packaging an integrated circuit.
- Learn the jargon associated with the microelectronics manufacturing industry.
- Learn the key concepts and process parameters of each process step.
Instructor
Bridget Rogers
Associate Professor, Chemical and Biomolecular Engineering Dept.
Vanderbilt University
NEW! Plasma-enhanced ALD: Basics, Equipment, Applications
- Introduce the fundamental principles of plasma-based processing and thin film preparation by (plasma-enhanced) ALD
- Explore how reactive and energetic species such as radicals, ions, and photons influence the ALD process and affect the properties of the resulting films, including film conformality on 3D surface topologies
- Offer a comprehensive overview of plasma-enhanced ALD reactor technologies, highlighting critical design features and process variables
- Examine several plasma-enhanced ALD processes for key material systems
- Provide insight into current and potential future uses for plasma-enhanced ALD
- Compare the advantages and disadvantages of plasma-enhanced ALD to traditional thermal ALD
Sputter Deposition
- Understand the fundamentals of sputter deposition
- Review and discuss options for sputtering system design
- Learn how rf sputtering differs from dc sputtering and understand how rf sputtering works
- Understand reactive sputtering
- Understand thin film properties are modified by adjusting sputtering parameters
Instructor
Angus Rockett
Head of the Dept. of Metallurgy and Materials Engineering, Colorado School of Mines; Emeritus Professor, Dept. of Materials Science and Engineering, University of Illinois
Other AVS Events
ICMCTF 2025 Short Course Program
Town & Country Resort Hotel and Convention Center
San Diego, CA
May 11-16, 2025
The International Conference on Metallurgical Coatings and Thin Films (ICMCTF) will host a series of Short Course Modules following four (4) tracks. The modules will be in two (2) hour increments.
Track 1 (T1) – Plasmas in PVD Deposition
Track 2 (T2) – Growth of Thin Films
Track 3 (T3) – Control of Film Properties
Track 4 (T4) – Toolbox for Coating Research
AVS Courses by Request
If you are interested in seeing an AVS Short Course offered in 2025 please complete the AVS Courses by Request form. (Recommended for individual training)
AVS Onsite/Online Training
Do your employees need training now? Are budgets tight? Let AVS bring our short courses and qualified instructors to your organization during these tough economic times via Zoom. Please complete the AVS Onsite/Online Training request form to receive a proposal. (Recommended for group training)
AVS Professional Development Webinar:
From Idea to Entrepreneur: Practical Advice to Build Your Business
Presenters: Craig Hunter, Katy Jinkins, and Tom Kelly
Date: February 13, 2025
Time: 1:00 p.m.-2:00 p.m. ET
AVS Publications Webinar:
Responding to Reviewer Comments
Presenters: Dan Graham, Stephanie Law, Alex Shard, Amy Walker, Joshua Zide
Date: April 24, 2025
Time: 1:00 p.m.-2:00 p.m. ET
Have an Idea for a Webinar or e-Talk?
We welcome suggestions for future Webinars and/or e-Talk topics and speakers.
Please e-mail Webinar suggestions to David Adams, AVS Short Course Chair, david_adams@avs.org.
Please e-mail e-Talk suggestions to Matthew Jordan, AVS e-Talk Chair, matt_jordan@avs.org.