AVS National Online Short Course Program Now Available!
General Information -
- AVS Platinum Member
$650 (2-day course); $350 (1-day course)
- Non-Member
$700 (2-day course); $400 (1-day course)
- Full-time Student/Requires Student I.D.
$300 (2-day course); $200 (1-day course)
Platform: Zoom
Course Includes: Link to PDF file of the copyrighted course notes.
IMPORTANT: You must be present the day of the course, recorded versions will not be available.
Course Times: Courses will either be half day (4 hours/day) with hourly 10 minutes breaks, or full day (7 hours/day) with morning and afternoon breaks, plus a 30-minute lunch break. Refer to course listings below
- Half Day: 10:00 a.m.-2:00 p.m. (ET)
- Full Day: 10:00 a.m.-5:00 p.m. (ET)
Times listed are Eastern Time (ET). Check your timezone!
During the online course you may ask questions. Instructors will review and answer them periodically throughout the course.
AVS Online Training Sponsorship Opportunities Available
Looking for additional sponsorship opportunities? Want to reach a broader audience? Consider sponsoring an upcoming AVS Short Course Program (public programs only), Webinar, and/or e-Talk! AVS Online Training has sponsorship opportunities available.
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Plasma-enhanced CVD: Fundamentals, Techniques, and Applications
- Learn why, where and how PECVD is used in industrial applications ranging from solar photovoltaics and semiconductors to hard coatings.
- Understand how the process variables affect the properties of materials and device performance.
- Learn and understand the basics of plasma equipment design and operation.
- Get a broad overview of current manufacturing equipment and fabrication processes.
Reactive Sputtering and Deposition
- Understand reactive processes for doping films.
- Learn about deposition methods and applications.
- Know the methods for sputtering insulators: AC, RF, Pulsed DC, ion beams, etc.
- Understand process monitoring and control methods as well as process modeling.
Instructor
Diederik Depla
Professor, Head of Research Group Dedicated Research on Advanced Films and Targets (DRAFT) Ghent University
Plasma Etching and RIE: Fundamentals and Applications
(1 or 2 day option: Day 1-Fundamentals; Day 2-Applications)
Tuesday, October 21, 2025 (Day 2: Applications)
- Know the basic concepts of plasma etching.
- Understand the physics of RF glow discharges (both high and low density).
- Understand the surface science aspects of reactive ion etching (RIE).
- Learn about plasma-surface chemistry leading to etching.
- Recognize the factors that influence etching anisotropy.
Basics of Radio Frequency Technology (1-day)
- Understand the radio frequency (RF) plasma system as an electronic circuit.
- Learn a systematic approach to viewing a RF plasma system.
- Know techniques for maintaining and troubleshooting RF systems.
Vacuum System Leak Detection and Basic Troubleshooting
Time: 10:00 a.m.-5:00 p.m. ET
- Real vs virtual leaks
- Leak rate specifications
- Different leak detection methods
- How a mass spectrometer leak detector works
- Care and feeding of a mass spectrometer leak detector
- Basic ways to use a mass spectrometer leak detector
- What to do when a leak is found
- Possible steps when a system passes leak test but has sub-par performance
- Sources of gas that can affect vacuum system performance
- Ways to mitigate gas sources
Atomic Layer Etching
- Learn the fundamentals of ALE based on sequential self-limiting reactions.
- Understand the differences between plasma ALE and thermal ALE.
- Learn about the surface chemistry and reactors for ALE.
- Understand why plasma ALE can obtain atomic layer precise anisotropic etching.
- Learn how thermal ALE can achieve atomic layer precise isotropic etching.
- Learn how ALE can be utilized for thin film nanoengineering and device fabrication.
- Understand the many current and potential applications of ALE.
Other AVS Events
AVS Rocky Mountain Chapter Short Course Program
Double Tree by Hilton-Westminster
Westminster, CO
November 5-7, 2025
- Five (5) Courses being offered.
AVS Courses by Request
If you are interested in seeing an AVS Short Course offered in 2025 please complete the AVS Courses by Request form. (Recommended for individual training)
AVS Onsite/Online Training
Do your employees need training now? Are budgets tight? Let AVS bring our short courses and qualified instructors to your organization during these tough economic times via Zoom. Please complete the AVS Onsite/Online Training request form to receive a proposal. (Recommended for group training)
AVS Webinar: Introduction to Quantum Materials and Devices
Presenter: Yong P. Chen, Tohoku University/Aarhus University
Date: November 19, 2025
Time: 1:00-5:00pm ET
Platform: Zoom
Have an Idea for a Webinar or e-Talk?
We welcome suggestions for future Webinars and/or e-Talk topics and speakers.
Please e-mail Webinar suggestions to David Adams, AVS Short Course Chair, david_adams@avs.org.
Please e-mail e-Talk suggestions to Matthew Jordan, AVS e-Talk Chair, matt_jordan@avs.org.